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BLM300 – 強光燈檢測模塊
2013-11-12
BLM300 – 強光燈檢測模塊 ?本產品可以放置在晶圓導片機或生產設備的晶圓裝載臺上，透過三個特制的強光燈的燈光，操作工可以檢測晶圓表面的顏色均勻度，灰塵顆粒和劃傷。 BLM300 – Bright Light Module The bright light module can be placed on the load port of a compatible 300mm wafer sorter or process tool, used in automatic or manual mode, operator can use it to inspect wafer surface for color uniformity, particles and scratches.
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光罩檢測晶圓排序機
光罩檢測晶圓排序機 法國RECIF的SPR光罩設備是自動光罩移片機,并帶有灰塵顆粒檢測和消除靜電功能, 本設備可以使用SMIF盒和手動打開的光罩運輸盒, 可以把光罩從光罩運輸盒傳送到SMIF盒里. 本產品不需真空,可以讀光罩刻號并具有實時光罩安全監測功能. SPR – Reticle handling and inspection The RECIF’s SPR reticle tool is automated reticle sorter with an inspection station combined with a de-ionized nitrogen cleaning feature. The reticle tool can be configured for both manual open shipping boxes and SMIC compatibility, reticles can be transfer from shipping box to SMIF POD’s Vacuum free reticle transfer and ID read.
