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光罩檢測晶圓排序機
2013-11-12
光罩檢測晶圓排序機 法國RECIF的SPR光罩設備是自動光罩移片機,并帶有灰塵顆粒檢測和消除靜電功能, 本設備可以使用SMIF盒和手動打開的光罩運輸盒, 可以把光罩從光罩運輸盒傳送到SMIF盒里. 本產品不需真空,可以讀光罩刻號并具有實時光罩安全監測功能. SPR – Reticle handling and inspection The RECIF’s SPR reticle tool is automated reticle sorter with an inspection station combined with a de-ionized nitrogen cleaning feature. The reticle tool can be configured for both manual open shipping boxes and SMIC compatibility, reticles can be transfer from shipping box to SMIF POD’s Vacuum free reticle transfer and ID read.
